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Author (up) Dong, ZQ; Liu SY; Chen, XG; Shi, YT; Zhang, CW; Jiang, H
Title Optimization of measurement configuration in optical scatterometry for one-dimensional nanostructure based on sensitivity analysis Type Journal Article
Year 2016 Publication GEC Journal of Research Incorporating the Marconi Reviewfrared and Millimeter Waves Abbreviated Journal
Volume 35 Issue 1 Pages 116-122
Keywords optical scatterometry; sensitivity analysis; measurement configuration; precision
Call Number COAPS @ refbase @ Serial 8292
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